TOPCon Solar Cells Achieve 22.8% Efficiency With Plasma-Aided Atomic Layer Deposition

The tunnel oxide deposition thickness was controlled at the atomic scale for higher efficiency

October 19, 2022

/ Gourav Mishra
/ Solar, Technology
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Researchers from China, Australia, and Singapore recently used a tube-type industrial plasma-assisted atomic layer deposition (PEALD) method and announced a maximum power conversion efficiency of 22.8% in a 613-Watt tunnel oxide passivated contact (TOPCon) module with 60 cells.

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Gourav Mishra

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SiliconSolar CellsTOPConTunnel oxide
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